Probe Specialists
Sitemap          About Probe Specialists          Contact Us     
Wafer Probers & Equipment TSK Equipment Parts Repairs
Updated Inventory List
Parts List
Service & Support
PCB Board Repair
Products

Perisight by Probe Specialists

Chip Check
NXG 2006
UF200 Spec Sheet

Disclaimer: All references are believed to be correct and accurate. Probe Specialists is not responsible for variances due to O.E.M. manufacturing tolerances, configuration, hardware, or software variances.

Overall Accuracy   Within 4µm
Wafer Size   5", 6", 8"
X/Y Axes
Probing Area
Maximum Speed 		  ±120mm
200mm/s
Z axis
Full Stroke
Maximum Speed 		  69mm
35ms/0.5mm Stroke
0axis Rotation Range   ±5 dec.
Fine Alignment   CCD ITV Image Processing
Loader
Cassette Mounts
Wafter Handling 		  1 (2nd cassette with option)
Robot Arm / Backside Holding
Hard Disk   3.5" 540MB (1 unit standard)
Floppy Disk   3.5" 2HD/2DD (1 unit standard)
Display   10.4" TFT Color LCD
Power Consumption   Approximately 1.5kVA
Air Supply
Source Pressure
Consumption 		  0.4 MPa or more
Approximately 0.1 liters/wafer
Vacuum Supply   Less than 50kPa, 30 liters/minute
Dimensions   1090W x 1100° x 880H mm
Weight   800kg (Standard)

TSK Equipment | UF200 Spec Sheet | APM90 Spec Sheet

Home | Wafer Prober & Equipment | TSK Equipment | Parts | Repair | Service & Support | Products

© 2008 Probe Specialists, Incorporated. Information provided on this site is for informational purposes only and may not be used without the consent of Probe Specialists. Please see our Privacy Policy. Graphic design and brand development by Examplify.