CLOSED-LOOP VISION SYSTEM PC-based Rack-Mount Vision System Dual CCD Camera Array Robust Design Adjustable For Probe Card Variances Vibration-Free Mount Lock-Down, Lock Up Mount Design

Perisight resides undetected "on top of" the prober's motion control subsystem, monitoring motion, direction, and motor driver control.

As the prober's X/Y stage completes each die-to-die move, Perisight optically measures the position, then corrects X and Y axes to achieve realistic positioning accuracy of 4.0 microns.

Cyclic, repeatability, and linear errors are statistically inherent in every linear motor X/Y stage. These errors are optically detected, then correct positioning compensation is applied within each movement. Perisight applies positioning compensation "real time", even compensating for chuck theta hysterisis factors. Other key features include:

• Field installable by factory personnel
• All chuck sizes
• Hot and Ambient chuck
• No forcer/platen reprofiling required
• 2000, 3000, 4085 series prober compatible