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Wafer Probers & Equipment TSK Equipment Parts Repairs
2080 Spec Sheet

Disclaimer: All references are believed to be correct and accurate. Probe Specialists is not responsible for variances due to O.E.M. manufacturing tolerances, configuration, hardware, or software variances.

Accuracy within 12 Microns / 0.5 mil (± 6 microns)
Wafer Size 4,5, 6, and 8 inch
Maximum X/Y Speed 250 mm (10") / sec.
   
Z Stage/Chuck
Range 0.200 "
Speed 15 ms / 0.020" stroke
Rotation ± 10º
   
Loader (wafer handler)
Cassette Capacity 2 standard; 1 sender, 1 receiver
Wafer handling belt & vacuum arm
Fine Alignment CCD image processing
Hard Disk Drive N/A
Floppy Disk Drive optional 3.5"; 2 drives
Display 9" B & W
Power Consumption Approx 1.5 KVA
   
Facilities Required
Air 75 PSI @ 3 cfm.
Vacuum 25 in/hg.
Dimensions 66"w x 32" D x 60" H; standard "high" configuration
Weight 1100 lbs.

Wafer Probers | 2001 Spec Sheet | 2080 Spec Sheet | 4090 Spec Sheet | 4080 Spec Sheet