Disclaimer: All references are believed to be correct and accurate. Probe Specialists is not responsible for variances due to O.E.M. manufacturing tolerances, configuration, hardware, or software variances.
| Accuracy |
|
within 12 Microns / 0.5 mil (± 6 microns) |
| Wafer Size |
|
4,5, 6, and 8 inch |
| Maximum X/Y Speed |
|
250 mm (10") / sec. |
| |
|
|
| Z Stage/Chuck |
|
|
| Range |
|
0.200 " |
| Speed |
|
15 ms / 0.020" stroke |
| Rotation |
|
± 10º |
| |
|
|
| Loader (wafer handler) |
|
|
| Cassette Capacity |
|
2 standard; 1 sender, 1 receiver |
| Wafer handling |
|
belt & vacuum arm |
| Fine Alignment |
|
CCD image processing |
| Hard Disk Drive |
|
N/A |
| Floppy Disk Drive |
|
optional 3.5"; 2 drives |
| Display |
|
9" B & W |
| Power Consumption |
|
Approx 1.5 KVA |
| |
|
|
| Facilities Required |
|
|
| Air |
|
75 PSI @ 3 cfm. |
| Vacuum |
|
25 in/hg. |
| Dimensions |
|
66"w x 32" D x 60" H; standard "high" configuration |
| Weight |
|
1100 lbs. |
Wafer Probers | 2001 Spec Sheet | 2080 Spec Sheet | 4090 Spec Sheet | 4080 Spec Sheet